A Fast Fourier Transform Approach to Finding the Thickness of Single-Layer Thin Films with Slowly Varying Indices of Refraction and Negligible Absorption Coefficients
dc.contributor.advisor | Chung, Matthias C. | |
dc.contributor.author | Miller, Geoffrey F. | |
dc.contributor.committeeMember | Geerts, Wilhelmus J. | |
dc.contributor.committeeMember | Passty, Gregory B. | |
dc.date.accessioned | 2012-07-17T19:28:47Z | |
dc.date.available | 2012-07-17T19:28:47Z | |
dc.date.issued | 2012-08 | |
dc.description.abstract | A nonstandard photolithographic exposure tool motivates the search for a method to determine photoresist thickness in real time. Optical physics of two-interface thin film systems and the theory of Fourier series reveal a way to calculate photoresist thickness by applying an FFT (fast Fourier transform) algorithm to the reflectance spectrum of a light beam incident on the photoresist. Analyses of simulated data and preliminary measurements assess the speed and accuracy of the FFT algorithm and suggest further areas of research. | |
dc.description.department | Mathematics | |
dc.format | Text | |
dc.format.extent | 69 pages | |
dc.format.medium | 1 file (.pdf) | |
dc.identifier.citation | Miller, G. F. (2012). A fast fourier transform approach to finding the thickness of single-layer thin films with slowly varying indices of refraction and negligible absorption coefficients (Unpublished thesis). Texas State University-San Marcos, San Marcos, Texas. | |
dc.identifier.uri | https://hdl.handle.net/10877/4259 | |
dc.language.iso | en | |
dc.subject | photolithograpthy | |
dc.subject | photolithography on non-flat substrates | |
dc.subject | Fourier | |
dc.subject | fast Fourier transform and Fourier series | |
dc.title | A Fast Fourier Transform Approach to Finding the Thickness of Single-Layer Thin Films with Slowly Varying Indices of Refraction and Negligible Absorption Coefficients | |
dc.type | Thesis | |
thesis.degree.department | Mathematics | |
thesis.degree.discipline | Mathematics | |
thesis.degree.grantor | Texas State University-San Marcos | |
thesis.degree.level | Masters | |
thesis.degree.name | Master of Science |