Ayala, Anival2019-11-262019-11-262000-12Ayala, A. (2000). Advanced X-ray characterization of ULSI materials (Unpublished thesis). Southwest Texas State University, San Marcos, Texas.https://hdl.handle.net/10877/8918No abstract prepared.Text92 pages1 file (.pdf)enintegrated circuitssemiconductorsintegrated circuitsx-raysx-raysthin-film circuitssemiconductor filmsultra large scale integrationdesign and constructionThesis