Mitchell, Evelynn J. R.2022-02-182022-02-182000-08Mitchell, E. J. R. (2000). Analysis and determination of chemical mechanical planarization mechanisms for tungsten and copper (Unpublished thesis). Southwest Texas State University, San Marcos, Texas.https://hdl.handle.net/10877/15364No abstract prepared.Text64 pages1 file (.pdf)ensemiconductor waferssilicon surfacessurface preparationcoppertungstenAnalysis and determination of chemical mechanical planarization mechanisms for tungsten and copperThesis