Cain, Heather M.2020-03-302020-03-302003-12Cain, H. M. (2003). Optical properties of athermally and thermally annealed hafnium oxide thin films on silicon (Unpublished thesis). Texas State University-San Marcos, San Marcos, Texas.https://hdl.handle.net/10877/9530No abstract prepared.Text66 pages1 file (.pdf)enthin filmshafnium oxidesiliconoptical propertiesOptical Properties of Athermally and Thermally Annealed Hafnium Oxide Thin Films on SiliconThesis