Fishbeck, Kelly2020-05-112020-05-112002-08Fishbeck, K. (2002). Modeling chemical mechanical planarization of copper with an atomic force microscope (Unpublished thesis). Southwest Texas State University, San Marcos, Texas.https://hdl.handle.net/10877/9833No abstract prepared.Text80 pages1 file (.pdf)encopperintegrated circuitsatomic force microscopyThesis