Design and Analysis of Capacitive Micromachined Ultrasonic Transducers
Currently, capacitive micromachined ultrasonic transducers (CMUTs) have emerged as an alternative to the well-established piezoelectric micromachined ultrasonic transducers (PMUTs). The micromachining technology has attracted MEMS researchers to assess the capabilities of CMUT devices to be introduced in various ultrasonic imaging applications. This thesis develops design characterization and simulations for square, hexagon, and circular CMUT cell structures to determine an ideal structure for operating CMUT applications. CMUT cells will be analytically modeled and simulated by Finite Element Modeling (FEM) using COMSOL Multiphysics to highlight the factors influencing the acoustic pressure output maximization. Based on the preliminary results, the hexagon membrane has the highest array packaging density while the more flexible circular membrane has the least amount of stress to operate. This research introduces factors significant for determining the CMUT design for applications with operating frequency ranges of approximately 1.5 MHz.
Howard, K. A. (2022). <i>Design and analysis of capacitive micromachined ultrasonic transducers</i> (Unpublished thesis). Texas State University, San Marcos, Texas.