Low-k Dielectric Materials by Diblock Copolymer Deposition
Date
2005-08
Authors
Galloway, Heather
Journal Title
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Abstract
We have demonstrated the ability to prepare thin films of
PMMA/PS diblock copolymers and to investigate their surface properties using AFM. We have also confirmed the required surface preparation and annealing times for these substrates. Future work will concentrate on other diblock polymers as well as using our extension to preparing these materials on SiC and SiCN to test their electrical properties.
Description
Research Enhancement Program Final Report
Keywords
Dielectric materials, Diblock, Copolymers, Films, Polymers, Electrical properties
Citation
Galloway, H. (2005). <i>Low-k dielectric materials by diblock copolymer deposition</i>. Research Enhancement Program, Texas State University, San Marcos, TX.