Low-k Dielectric Materials by Diblock Copolymer Deposition
We have demonstrated the ability to prepare thin films of PMMA/PS diblock copolymers and to investigate their surface properties using AFM. We have also confirmed the required surface preparation and annealing times for these substrates. Future work will concentrate on other diblock polymers as well as using our extension to preparing these materials on SiC and SiCN to test their electrical properties.
Research Enhancement Program Final Report
Dielectric materials, Diblock, Copolymers, Films, Polymers, Electrical properties
Galloway, H. (2005). <i>Low-k dielectric materials by diblock copolymer deposition</i>. Research Enhancement Program, Texas State University, San Marcos, TX.