Inkjet-printed flexible MEMS switches for phased-array antennas

dc.contributor.authorMonne, Mahmuda Akter
dc.contributor.authorLan, Xing
dc.contributor.authorZhang, Chunbo
dc.contributor.authorChen, Maggie Yihong
dc.date.accessioned2021-04-14T17:00:30Z
dc.date.available2021-04-14T17:00:30Z
dc.date.issued2018-03
dc.description.abstractThis paper presents a fully inkjet-printed flexible MEMS switch for phased-array antennas. The physical structure of the printed MEMS switch consists of an anchor with a clamp-clamp beam, a sacrificial layer, and bottom transmission lines. 5-mil Kapton® polyimide film is used as a flexible substrate material. Two different types of conductive ink PEDOT : PSS from Sigma Aldrich and silver nanoparticle ink from NovaCentrix are used for the fabrication of different printed layers. Layer-by-layer fabrication process and material evaluation are illustrated. Layer characterization is done with respect to critical thickness and resistance using 2D/3D material analysis. Fujifilm Dimatix Material Printer (DMP-2800) is used for fabrication, and KLA-Tencor (P-7) profiler is used for 2D and 3D analysis of each layer. The MEMS switch has a low actuation voltage of 1.2 V, current capacity of 0.2195 mA, a current on-off ratio of 2195 : 1, and an RF insertion loss of 5 dB up to 13.5 GHz. Printed MEMS switch technology is a promising candidate for flexible and reconfigurable phased-array antennas and other radio frequency (RF) and microwave frequency applications.
dc.description.departmentEngineering
dc.formatText
dc.format.extent11 pages
dc.format.medium1 file (.pdf)
dc.identifier.citationMonne, M. A., Lan, X., Zhang, C., & Chen, M. Y. (2018). Inkjet-printed flexible MEMS switches for phased-array antennas. International Journal of Antennas and Propagation, 2018, pp. 1-10.
dc.identifier.doihttps://doi.org/10.1155/2018/4517848
dc.identifier.urihttps://hdl.handle.net/10877/13377
dc.language.isoen
dc.publisherHindawi
dc.rights.holder© 2018 Mahmuda Akter Monne et al.
dc.rights.licenseThis work is licensed under a Creative Commons Attribution 4.0 International License.
dc.sourceInternational Journal of Antennas and Propagation, 2018, Article ID 4517848, pp. 1-10.
dc.subjectphased-array antennas
dc.subjectMEMS switches
dc.subjectinkjet printing
dc.subjectIngram School of Engineering
dc.titleInkjet-printed flexible MEMS switches for phased-array antennas
dc.typeArticle

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