Inkjet-printed flexible MEMS switches for phased-array antennas
dc.contributor.author | Monne, Mahmuda Akter | |
dc.contributor.author | Lan, Xing | |
dc.contributor.author | Zhang, Chunbo | |
dc.contributor.author | Chen, Maggie Yihong | |
dc.date.accessioned | 2021-04-14T17:00:30Z | |
dc.date.available | 2021-04-14T17:00:30Z | |
dc.date.issued | 2018-03 | |
dc.description.abstract | This paper presents a fully inkjet-printed flexible MEMS switch for phased-array antennas. The physical structure of the printed MEMS switch consists of an anchor with a clamp-clamp beam, a sacrificial layer, and bottom transmission lines. 5-mil KaptonĀ® polyimide film is used as a flexible substrate material. Two different types of conductive ink PEDOT : PSS from Sigma Aldrich and silver nanoparticle ink from NovaCentrix are used for the fabrication of different printed layers. Layer-by-layer fabrication process and material evaluation are illustrated. Layer characterization is done with respect to critical thickness and resistance using 2D/3D material analysis. Fujifilm Dimatix Material Printer (DMP-2800) is used for fabrication, and KLA-Tencor (P-7) profiler is used for 2D and 3D analysis of each layer. The MEMS switch has a low actuation voltage of 1.2 V, current capacity of 0.2195 mA, a current on-off ratio of 2195 : 1, and an RF insertion loss of 5 dB up to 13.5 GHz. Printed MEMS switch technology is a promising candidate for flexible and reconfigurable phased-array antennas and other radio frequency (RF) and microwave frequency applications. | |
dc.description.department | Engineering | |
dc.format | Text | |
dc.format.extent | 11 pages | |
dc.format.medium | 1 file (.pdf) | |
dc.identifier.citation | Monne, M. A., Lan, X., Zhang, C., & Chen, M. Y. (2018). Inkjet-printed flexible MEMS switches for phased-array antennas. International Journal of Antennas and Propagation, 2018, pp. 1-10. | |
dc.identifier.doi | https://doi.org/10.1155/2018/4517848 | |
dc.identifier.uri | https://hdl.handle.net/10877/13377 | |
dc.language.iso | en | |
dc.publisher | Hindawi | |
dc.rights.holder | Ā© 2018 Mahmuda Akter Monne et al. | |
dc.rights.license | This work is licensed under a Creative Commons Attribution 4.0 International License. | |
dc.source | International Journal of Antennas and Propagation, 2018, Article ID 4517848, pp. 1-10. | |
dc.subject | phased-array antennas | |
dc.subject | MEMS switches | |
dc.subject | inkjet printing | |
dc.subject | Ingram School of Engineering | |
dc.title | Inkjet-printed flexible MEMS switches for phased-array antennas | |
dc.type | Article |