Modeling Chemical Mechanical Planarization of Copper with an Atomic Force Microscope
Date
2002-08
Authors
Fishbeck, Kelly
Journal Title
Journal ISSN
Volume Title
Publisher
Abstract
No abstract prepared.
Description
Keywords
copper, integrated circuits, atomic force microscopy
Citation
Fishbeck, K. (2002). Modeling chemical mechanical planarization of copper with an atomic force microscope (Unpublished thesis). Southwest Texas State University, San Marcos, Texas.