The Magnetic Characterization of Permalloy and Permalloy Oxide grown by RF Magnetron Sputtering

D.C., Binod
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<p>This thesis describes the results on my thesis research. I investigated properties of Permalloy and Permalloy oxide thin films with Xray photoelectron spectroscopy (XPS), Xray diffractometry (XRD) and vibrating sample magnetometry (VSM). Focus was on properties that had not been investigated in detail by former graduate students from Dr. Geerts. The thesis also contains a literature study on the texture of Permalloy and Permalloy oxide RF sputtered films, and preliminary magnetic measurements performed on those samples and magnetic recording samples to learn more about the new MicroSense biaxial VSM.</p> <p>The first chapter first introduces different types of magnetic materials followed by a literature review of Permalloy and Permalloy oxide focused on texture and magnetic properties related to this thesis research. The second chapter starts by introducing the reader to the working principle of the MicroSense vibrating sample magnetometer (VSM). This chapter includes a discussion of the measurement principle, noise sources and systematic errors associated with the VSM measurement method. The available measurement procedures of the VSM lie in the heart of this chapter. The third chapter talks about the AJA Sputtering System which was used to deposit the Permalloy and Permalloy oxide thin films. It includes details on the sputtering system and describes the process used to make the samples. It includes the results of the XPS and magnetic studies on Permalloy Oxide. The chapter also talks about the X-ray diffractometer (XRD) which was used to determine the texture of the Permalloy films and includes the XRD measurement results. The fourth chapter mainly focuses on the magnetic case studies on floppy and VHS samples to better understand the MicroSense VSM and its measurement methods. In addition, this chapter also contains the preliminary results on floppy, VHS tape, and Permalloy samples. And finally, the fifth chapter summarizes the most important results of this research work; this chapter also contains details about suggested future works.</p>
Magnetism, Thin-film, Permalloy, Permalloy oxide, Radio frequency, VSM, Sensitivity, Cross-talk, XPS, XRD, Pole figure, Texture
D.C., B. (2019). <i>The magnetic characterization of permalloy and permalloy oxide grown by RF magnetron sputtering</i> (Unpublished thesis). Texas State University, San Marcos, Texas.